"㈜인포비온"은

인류의 미래를 새롭게 창조해 나아갈 장비, 첨단소재 업체입니다

기술현황 - Electron Beam Process

Energy Beam Annealing Technology

Kinetic energy of electron is transmitted to atoms
The energy induces crystallization of atoms
Heating the surface only (Non thermal damage to substrate)

Application

Crystallization control of the TCO (Transparent Conductive Oxide) film for display

  • ITO (Indium Tin Oxide)

  • AZO (Aluminum Zinc Oxide)

Improving the properties of semiconductor materials

Activation of oxide TFT material

Atomic rearrangement of a sputtered MoS2 film by electron beam irradiation

(SCIENTIFIC REPORTS DOI:10.1038/s41598-017-04222-6. Joint development with KICET)