"㈜인포비온"은

인류의 미래를 새롭게 창조해 나아갈 장비, 첨단소재 업체입니다

기술현황 - Electron Beam Process

Energy Beam Annealing Technology

Kinetic energy of an electron is transmitted to atoms.
The energy induces the crystallization of atoms.
Heating the surface only (Non-damage to substrate)

Application

Crystallization control of the TCO (Transparent Conductive Oxide) film for display

  • ITO (Indium Tin Oxide)

  • AZO (Aluminum Zinc Oxide)

Improving the properties of semiconductor materials

Activation of oxide TFT material

Atomic rearrangement of a sputtered MoS2 film by electron beam irradiation

(SCIENTIFIC REPORTS DOI:10.1038/s41598-017-04222-6. Joint development with KICET)