기술현황 - Electron Beam Process
Energy Beam Annealing Technology
Kinetic energy of an electron is transmitted to atoms.
The energy induces the crystallization of atoms.
Heating the surface only (Non-damage to substrate)
Crystallization control of the TCO (Transparent Conductive Oxide) film for display
Improving the properties of semiconductor materials
Activation of oxide TFT material
Atomic rearrangement of a sputtered MoS2 film by electron beam irradiation
(SCIENTIFIC REPORTS DOI:10.1038/s41598-017-04222-6. Joint development with KICET)