"㈜인포비온"은

인류의 미래를 새롭게 창조해 나아갈 장비, 첨단소재 업체입니다

기술현황 - 디스플레이 연구소

Introduction

Research Institute of Display and Plasma Technology

Welcome to INFOVION research institute of display and plasma technology. We have focused on the development of industrial technology through the expansion of R&D in areas including flexible display, semiconductor, energy, functional material and electronic material since the establishment of the research institute of display technology in February 2004. And we are also focusing on securing technological capability by successfully carrying out various national R&D projects. Our researchers are sincerely dedicated to challenging current mindsets and pioneering the future.

Research equipment

Deposition / Beam treatment chamber

In-line sputtering and beam treatment system / Gen.6
In-line ALD system / Gen.2
IBD (Ion beam deposition system)
Arc deposition chamber
Sputtering chamber
Linear beam test chamber

Beam sources

Ion beam source (Round and Linear)
Electron beam source (Round and Linear)