CIGS Cluster Deposition System

Details

• 카달로그 다운로드

• CIGS Cluster (thin film solar cell) system consists of 4 process module & 1 transfer module.
  This system can be possible to deposit the multi layers ; Mo back contact layer , CIGS (Cu, In, Ga, Se) absorber layer, MgF2 AR (Anti-reflective) layer and AZO TCO layer.

  Specification

  Process module : Sputter module 2ea : Metal sputter & TCO sputter E-beam Evaporator 1ea : AR coating & metal deposition CIGS Evaporator 1ea : CIGS evaporation using by metal cell source Transfer module : vacuum robot & 6~8 side transfer module Base pressure : - Process chamber ≤ 1 x 10-7 torr - Transfer chamber ≤ 1 x 10-6 torr Sample size : 100 x 100mm soda lime glass Substrate heating : up to 700℃ Software interfaces : HMI programing base GUI software

  Application

  CIGS thin film solar cell