"㈜인포비온"
인류의 미래를 새롭게 창조해 나아갈 장비, 첨단소재 업체입니다
진공장비 - PVD
CIGS Cluster Deposition System
Details
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CIGS Cluster (thin film solar cell) system consists of 4 process module & 1 transfer module.
This system can be possible to deposit the multi layers ; Mo back contact layer , CIGS (Cu, In, Ga, Se) absorber layer, MgF2 AR (Anti-reflective) layer and AZO TCO layer.Specification Process module :
Sputter module 2ea : Metal sputter & TCO sputter
E-beam Evaporator 1ea : AR coating & metal deposition
CIGS Evaporator 1ea : CIGS evaporation using by metal cell source
Transfer module : vacuum robot & 6~8 side transfer module
Base pressure :
- Process chamber ≤ 1 x 10-7 torr
- Transfer chamber ≤ 1 x 10-6 torr
Sample size : 100 x 100mm soda lime glass
Substrate heating : up to 700℃
Software interfaces : HMI programing base GUI software
Application CIGS thin film solar cell