"㈜인포비온"은

인류의 미래를 새롭게 창조해 나아갈 장비, 첨단소재 업체입니다

진공장비 - OLED

OLED Deposition System (Single Type)

Details

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  • OLED cluster system can be applied to make a mono and full color lighting system.
    This system enables to deposit an organic, alkali metal and metal.
    And mask exchange mechanism are available in process chamber.

    Specification Process module : organic & metal evaporator module 1 ea
    Transfer module : vacuum robot & degassing modulev
    Source :
    - organic 10 ea middle temp source(~ 700℃) each chamber
    - 3 metal source in each chamber
    - max 4 materials co-deposition
    Deposition rate control: ≤ 0.1A/s
    Mask change module: 3- mask auto changer in process chamber,
    pin align type (±100 ㎛)
    Base pressure :
    - Process chamber ≤ 1 x 10-7 torr
    - Transfer chamber ≤ 1 x 10-6 torr
    Sample size: 100 x 100mm ~ 200 x 200mm
    Glove box : 1 workstation (2 port glove), O₂, H₂O ≤ 1 ppm
    Spin coater, dispenser, UV curing: optional
    Software interfaces : HMI programing base GUI software
    Application PMOLED and AMOLED deposition on wafer and glass substrate.
    Organic material system for R&D use.