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  • Ion Beam Source
  • RF Round Ion Source
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      >RF Round Ion Source
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      >Linear Ion Source
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      >Anode Ion Source
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      >Round Anode Source
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      >EBA Source
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"㈜인포비온"

인류의 미래를 새롭게 창조해 나아갈 장비, 첨단소재 업체입니다

RF Round Ion Source

RF Round Ion Source (INFO-RF60G, INFO-RF120G, INFO-RF150G, INFO-RF200G)

1. Low-maintenance parts

2. Operation with all inert and reactive gases

3. Various size options(⌀60 ~ ⌀240)

4. Effect of pre-cleaning, chemical modification of a surface, reactive etching, oxidizing & nitriding of surface, and deposition of IBD (Ion Beam Deposition) &
IBAD (Ion Beam Assisted Deposition)

  • INFO-RF-60G
  • INFO-RF-120G

Details

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  • Dimension
    A 53
    B 146
    C 298
    D 134
    E 134
    Connetion Type Size
    Water Quick Coupler ⌀ 6
    Gas VCR male ⌀ 1/4"
    Type Input Qutput
    DC Power
    Generator
    Beam Single Phase 220V + 0 ~ 5kV
    Accel Single Phase 220V - 0 ~ 500V
    RF Power
    Generator
    Plasma
    Ignition
    Single Phase 220V 0 ~ 600W

Detail

  • Dimension
    A 129
    B 212
    C 226
    D 134
    E 172
    Connetion Type Size
    Water Quick Coupler ⌀ 6
    Gas VCR male ⌀ 1/4"
    Type Input Qutput
    DC Power
    Generator
    Beam Single Phase 220V + 0 ~ 5kV
    Accel Single Phase 220V - 0 ~ 500V
    RF Power
    Generator
    Plasma
    Ignition
    Single Phase 220V 0 ~ 1kW