Details

• 카달로그 다운로드

• Base System Features	Specifications
  Ion Source Type	Anode Ion Source
  Beam Aperture	350 ~ 2400 mm
  Beam Energy	100~3000eV
  Using Gas	Reactive & Inert gas
  Cooling Type	Water cooling
  Plasma Chamber	N/A
  Plasma source	Anode Type
  Grid Configuration	N/A
  Beam Neutralization	N/A
  Mounting Configuration	Standard External Flange Mounting by O-ring