진공장비

• Ion Beam Sputter System
• Ion Beam Treatment
  Sputter
• Combi IBD System
• Cluster Sputter System
• Evaporator System
• ARC Ion Plating System

• EBA assisted Sputter
  Deposition System
• IBAD System
• CIGS Cluster System
• PECVD
• OLED Cluster System
  (Cluster Type)
• OLED Deposition System (Single Type)

• RTA
• Perovskite Cluster System

진공부품

• RF Round Ion Source
  (60G)
• RF Round Ion Source
  (120G)
• Linear Ion Source
  (60X450G)
• Linear Ion Source
  (60X1500G)
• Anode Ion Source
  (700mm)
• Anode Ion Source
  (2400mm)

• Round Anode Source
• EBA Source