"㈜인포비온"은

인류의 미래를 새롭게 창조해 나아갈 장비, 첨단소재 업체입니다

진공부품 - Round Anode Source

Detail

  • 카달로그 다운로드
  • Base System Features Specifications
    Ion Source Type Anode Ion Source
    Ion Beam Aperture 60 mm
    Ion Beam Effective Zone Ø 100 mm
    Beam Energy 100~3,000 eV
    Supply Gas Inert gas (Ar 200sccm)
    Cooling Type Water cooling
    Plasma source Anode Type
    Grid Configuration N/A
    Beam Neutralization N/A
    Mounting Configuration N/A