"㈜인포비온"은

인류의 미래를 새롭게 창조해 나아갈 장비, 첨단소재 업체입니다

진공부품 - RF Linear Ion Source

RF Linear Ion Source (INFO-RF-60X450G, INFO-RF-60X740G)

1. Long maintenance intervals

2. Operation with all inert and reactive gases

3. Various production of Source size(⌀60 ~ ⌀240)

4. Effect of pre-cleaning, chemical modification of a surface, reactive etching, oxidizing & nitriding of surface, and deposition of IBD (Ion Beam Deposition) & IBAD (Ion Beam Assisted Deposition)

  • INFO-RF-60X450G
  • INFO-RF-60X740G

Detail

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  • Dimension
    A 53
    B 146
    C 298
    D 134
    E 134
    Connetion Type Size
    Water Quick Coupler ⌀ 6
    Gas VCR male ⌀ 1/4"
    Type Input Qutput
    DC Power
    Generator
    Beam Single Phase 220V + 0 ~ 5kV
    Accel Single Phase 220V - 0 ~ 500V
    RF Power
    Generator
    Plasma
    Ignition
    Single Phase 220V 0 ~ 3kW

Detail

  • Dimension
    A 734
    B 60
    C 740
    D 130
    E 164
    Connetion Type Size
    Water Quick Coupler ⌀ 1/4inch
    Gas VCR male ⌀ 1/4inch
    Type Input Qutput
    DC Power
    Generator
    Beam Single Phase 220V + 0 ~ 5kV
    Accel Single Phase 220V - 0 ~ 500V
    RF Power
    Generator
    Plasma
    Ignition
    Single Phase 220V 0 ~ 5kW