"㈜인포비온"은

인류의 미래를 새롭게 창조해 나아갈 장비, 첨단소재 업체입니다

진공장비 - PVD

IBAD System

Detail

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  • IBAD (Ion Beam Assisted Deposition) system is designed for coating of lift-off, planetary, satellite substrate. Evaporation system can be deposit metal and oxide on a substrate with ion beam assisted.

    Specification Ion beam source: RF type ion source, source size: Ø60~Ø200
    Neutralizer: RF type neutralizer (filament-less)
    E-beam gun: Single crucible and multi-crucible e-beam gun with power supplies of 6, 10,15 kW power
    E-beam angle : 180° or 270°
    Sample size : 4 inch single ~ 1600mm dome
    Substrate type : single stage, lift-off dome, planetary dome, satellite dome
    Base pressure : ≤ 1 x 10-7 torr
    Software interfaces : HMI programing base GUI software
    Application Super conductor
    LED, LD and high-speed devices
    Optical coating
    AR coating
    Material reserch & development