"㈜인포비온"은

인류의 미래를 새롭게 창조해 나아갈 장비, 첨단소재 업체입니다

진공장비 - PVD

Sutter Deposition System

Detail

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  • CGIS Cluster (thin film solar cell) system consists of 4 process module & 1 transfer module. This system can be possible Mo back metal deposition, CIGS (Cu, In, Ga, Se) absorber layer deposition, MgF2 AR(Anti-reflective) layer deposition and AZO TCO layer deposition.

    Specification Process module :
    Sputter module 2ea : Metal sputter & TCO sputter
    E-beam Evaporator 1ea : AR coating & metal deposition
    CIGS Evaporator 1ea : CIGS evaporation using by metal cell source
    Transfer module : vacuum robot & 6~8 side transfer module
    Base pressure :
    - Process chamber ≤ 1 x 10-7 torr
    - Transfer chamber ≤ 1 x 10-6 torr
    Sample size : 100 x 100mm soda lime glass
    Substrate heating : up to 700℃
    Software interfaces : HMI programing base GUI software
    Application CIGS thin film solar cell