"㈜인포비온"은

인류의 미래를 새롭게 창조해 나아갈 장비, 첨단소재 업체입니다

진공장비 - AMOLED

Single Type

Detail

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  • OLED cluster system can implement mono and full color lighting system. This system is enabling the deposition of organic, alkali metal and metal. And mask exchange mechanism are available in process chamber.

    Specification Process module : organic & metal evaporator module 1 ea
    Transfer module : vacuum robot & degassing modulev Source :
    - organic 10 ea middle temp source(~ 700℃) each chamber
    - metal source 3 ea each chamber
    - max 4 material co-deposition
    Deposition rate control: ≤ 0.1A/s
    Mask change module: 3- mask auto changer in process chamber, pin align type (±100 ㎛)
    Base pressure :
    - Process chamber ≤ 1 x 10-7 torr
    - Transfer chamber ≤ 1 x 10-6 torr
    Sample size: 100 x 100mm ~ 200 x 200mm
    Glove box : 1 workstation (2 port glove), O₂, H₂O ≤ 1 ppm
    Spin coater, dispenser, UV curing: optional
    Software interfaces : HMI programing base GUI software
    Application PMOLED and AMOLED deposition on wafer and glass substrate.
    Organic material system for R&D use.